Ukucaciswa | LMT-XY-200X200 | I-ABVT-Z20(Isitimela esithwala umoya) |
Uhlobo Lwezimoto | Injini engenansimbi enezigaba ezintathu | I-Voice coil motor+ |
Isixazululo | Ubuningi bedijithali obungu-100nm obuzenzakalelayo | 1vpp kwehle kuye ku-5nm |
I-motor thrust | I-60N/i-peak engu-210N eqhubekayo | I-60N/i-peak engu-210N eqhubekayo |
Ubuncane besinyathelo sikasayizi[nm] | 200nm | 100nm |
Ukuvakasha [mm] | 200×200 | 10 |
Ukuphindaphinda [um] | ±0.3 | |
Ukunemba Kwesikhundla [um] | ±1 | ±0.5 |
Ukulala [um] | 10 um | 5 um |
Ukuqonda [um] | 1 um | 1 um |
Isivinini esikhulu [mm/s] | 500mm/s | 30mm/s |
Amandla okulayisha [kg] | 5kg(i-axis engu-Z enesisindo sebhalansi ye-pneumatic constant force) |